CVD of hard coatings
Material | coating applications |
---|---|
TiN, TiC, Ti(C,N), ZrC ... | wear resistenat coatings |
Al2O3 | cutting tools |
TaC, CrXCy | hard and corrosion resistant |
diamond | hard coating, high heat conductivity |
CVD deposition
Material | applications |
BCN | dielectrica |
W, WC | powders |
CNT - carbon nanotubes | powders |
Specific equipment for CVD
- Small equipment for CVD of hard layers and Carbon Nanotubes
- Plasma equipment for diamond growth (hot-filament, microwave)
- Analytical equipment like, Raman microscope, surface roughness measurement