Research Group Chemical Vapour Deposition
> Zum Inhalt

CVD of hard coatings

Material coating applications
TiN, TiC, Ti(C,N), ZrC ... wear resistenat coatings
Al2O3 cutting tools
TaC, CrXCy hard and corrosion resistant
diamond hard coating, high heat conductivity

CVD deposition

Material applications
BCN dielectrica
W, WC powders
CNT - carbon nanotubes powders

Specific equipment for CVD

  • Small equipment for CVD of hard layers and Carbon Nanotubes
  • Plasma equipment for diamond growth (hot-filament, microwave)
  • Analytical equipment like, Raman microscope, surface roughness measurement