Research Group Chemical Vapour Deposition
CVD of hard coatings
| Material | coating applications |
|---|---|
| TiN, TiC, Ti(C,N), ZrC ... | wear resistenat coatings |
| Al2O3 | cutting tools |
| TaC, CrXCy | hard and corrosion resistant |
| diamond | hard coating, high heat conductivity |
CVD deposition
| Material | applications |
| BCN | dielectrica |
| W, WC | powders |
| CNT - carbon nanotubes | powders |
Specific equipment for CVD
- Small equipment for CVD of hard layers and Carbon Nanotubes
- Plasma equipment for diamond growth (hot-filament, microwave)
- Analytical equipment like, Raman microscope, surface roughness measurement